Bender, HugoHugoBenderDe Coster, WalterWalterDe CosterBrijs, BertBertBrijsAlay, Josep LluisJosep LluisAlayVandervorst, WilfriedWilfriedVandervorst2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/34HREM characterization of oxygen ion beam sputtered epitaxial CoSi2Proceedings paper