Rottenberg, XavierXavierRottenbergJansen, RoelofRoelofJansenRochus, VeroniqueVeroniqueRochusFigeys, BrunoBrunoFigeysNauwelaers, BartBartNauwelaersTilmans, HarrieHarrieTilmans2021-10-202021-10-202012-06https://imec-publications.be/handle/20.500.12860/21431Low motional impedance bulk acoustic resonators based on metamaterialsProceedings paper