Leakage mechanisms of sub-pA InGaAs/GaAs nano-ridge waveguide photodetectors monolithically integrated on a 300-mm Si wafer

Ozdemir, Cenk IbrahimCenk IbrahimOzdemirDe Koninck, YannickYannickDe KoninckPatra, Saroj KantaSaroj KantaPatraBaryshnikova, MarinaMarinaBaryshnikovaKunert, BernardetteBernardetteKunertPantouvaki, MariannaMariannaPantouvakiVan Campenhout, JorisJorisVan CampenhoutVan Thourhout, DriesDriesVan Thourhout2025-07-082024-08-032025-07-0820240022-3727WOS:001276854400001https://imec-publications.be/handle/20.500.12860/44257Leakage mechanisms of sub-pA InGaAs/GaAs nano-ridge waveguide photodetectors monolithically integrated on a 300-mm Si waferJournal article10.1088/1361-6463/ad233bWOS:001276854400001LOW DARK CURRENTRECOMBINATIONPHOTONICS