Au-free low temperature ohmic contacts for AlGaN/GaN power devices on 200 mm substrates

Firrincieli, AndreaAndreaFirrincieliDe Jaeger, BriceBriceDe JaegerYou, ShuzhenShuzhenYouWellekens, DirkDirkWellekensVan Hove, MarleenMarleenVan HoveDecoutere, StefaanStefaanDecoutere2021-10-212021-10-212013-09https://imec-publications.be/handle/20.500.12860/22346Au-free low temperature ohmic contacts for AlGaN/GaN power devices on 200 mm substratesProceedings paper