Van Look, LieveLieveVan LookPhilipsen, VickyVickyPhilipsenHendrickx, EricEricHendrickxVandenberghe, GeertGeertVandenbergheKnops, RoelRoelKnopsDavydova, NataliaNataliaDavydovaWittebrood, FrisoFrisoWittebroodDe Kruif, RobertRobertDe KruifVan Oosten, AntonAntonVan OostenFliervoet, TimonTimonFliervoetVan Schoot, JanJanVan SchootNeumann, Jens TimoJens TimoNeumann2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24708Alternative EUV mask technology for mask 3D effect compensationProceedings paperhttp://www.cvent.com/events/2014-international-symposium-on-extreme-ultraviolet-lithography/custom-115-011f0e62fcbf423683889785e