Ameen, MahmoudMahmoudAmeenNyns, LauraLauraNynsSioncke, SonjaSonjaSionckeLin, DennisDennisLinIvanov, TsvetanTsvetanIvanovConard, ThierryThierryConardMeersschaut, JohanJohanMeersschautFeteha, M. Y.M. Y.FetehaVan Elshocht, SvenSvenVan ElshochtDelabie, AnneliesAnneliesDelabie2021-10-222021-10-2220142162-8769https://imec-publications.be/handle/20.500.12860/23487Al2O3/InGaAs metal-oxide-semiconductor interface properties: impact of Gd2O3 and Sc2O3 interfacial layers by atomic layer depositionJournal articlehttp://jss.ecsdl.org/content/3/11/N133.abstract