Measurement and analysis of parasitic capacitance in FinFETs with high-k dielectrics and metal-gate stack

Dixit, AbhisekAbhisekDixitBandhyopadhyay, AnirbanAnirbanBandhyopadhyayCollaert, NadineNadineCollaertDe Meyer, KristinKristinDe MeyerJurczak, GosiaGosiaJurczak2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15240Measurement and analysis of parasitic capacitance in FinFETs with high-k dielectrics and metal-gate stackProceedings paper