Multivariate analysis of a 100-nm process measured by in-line scatterometry

Egret, S.S.EgretFurusho, TetsunariTetsunariFurushoBaudemprez, BartBartBaudemprez2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8875Multivariate analysis of a 100-nm process measured by in-line scatterometryProceedings paper