Leroy, FFLeroyTillocher, TTTillocherZhang, LipingLipingZhangGirard, A.A.GirardCardinaud, C.C.CardinaudLefaucheux, P.P.Lefaucheuxde Marneffe, Jean-FrancoisJean-Francoisde MarneffeDussart, R.R.DussartMaekawa, KKMaekawaYatsuda, KKYatsudaBaklanov, MikhaïlMikhaïlBaklanov2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25532Cryogenic etching of porous organosilicate low-k materials: fluorine based plasma analysisMeeting abstracthttp://pesm-conference.org/files/2015_abstractbook.pdf