Ohashi, TakeyoshiTakeyoshiOhashiYamaguchi, AtsukoAtsukoYamaguchiHasumi, KazuhisaKazuhisaHasumiIkota, MasamiMasamiIkotaTan, Chi LimChi LimTanRaymaekers, TomTomRaymaekersVan den Bosch, GeertGeertVan den BoschFurnemont, ArnaudArnaudFurnemontLorusso, GianGianLorusso2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/291033D measurement of 3D NAND memory hole with CD-SEM and tilted FIBProceedings paperhttp://mne2017.org/wp-content/uploads/2017/10/Booklet_MNE_FINAL_WEB.pdf