Systematic TLM measurements of NiSi and PtSi specific contact resistance to n- and p- type Si in a broad doping range

Stavitski, NatalieNatalieStavitskiVan Dal, Mark J. H.Mark J. H.Van DalLauwers, AnneAnneLauwersVrancken, ChristaChristaVranckenKovalgin, Alexey Y.Alexey Y.KovalginWolters, Rob A.M.Rob A.M.Wolters2021-10-172021-10-1720080741-3106https://imec-publications.be/handle/20.500.12860/14512Systematic TLM measurements of NiSi and PtSi specific contact resistance to n- and p- type Si in a broad doping rangeJournal article