Preventing the Capillary-Induced Collapse of Vertical Nanostructures

Ghosh, TanmayTanmayGhoshFritz, Eva-CorinnaEva-CorinnaFritzBalakrishnan, DeepanDeepanBalakrishnanZhang, ZiyuZiyuZhangVrancken, NandiNandiVranckenAnand, UtkarshUtkarshAnandZhang, HongHongZhangLoh, N. DuaneN. DuaneLohXu, XiuMeiXiuMeiXuHolsteyns, FrankFrankHolsteynsNijhuis, Christian A.Christian A.NijhuisMirsaidov, UtkurUtkurMirsaidov2022-12-152022-03-262022-12-1520221944-8244WOS:000768792500068https://imec-publications.be/handle/20.500.12860/39527Preventing the Capillary-Induced Collapse of Vertical NanostructuresJournal article10.1021/acsami.1c17781WOS:000768792500068ANTI-STICTION COATINGSPATTERN COLLAPSEFABRICATIONSURFACESFORCESARRAYSMEDLINE:35040618