Leunissen, PeterPeterLeunissenJonckheere, RikRikJonckheereRonse, KurtKurtRonseDerksen, G.B.G.B.Derksen2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7800Influence of gate patterning on line edge roughnessJournal article