Acoustic manipulation capabilities of a multifrequency aluminium nitride based PMUT

Weekers, BartBartWeekersBillen, MargoMargoBillenRochus, VeroniqueVeroniqueRochusRottenberg, XavierXavierRottenbergLagae, LiesbetLiesbetLagae2021-10-292021-10-292020https://imec-publications.be/handle/20.500.12860/36314Acoustic manipulation capabilities of a multifrequency aluminium nitride based PMUTOral presentationhttps://www.comsol.com/paper/acoustic-manipulation-capabilities-of-a-multifrequency-aln-based-pmut-95811