Optimisation of dHF-based cleaning recipes: to remove or not to remove a particle?

Vos, RitaRitaVosCornelissen, IngridIngridCornelissenMeuris, MarcMarcMeurisMertens, PaulPaulMertensHeyns, MarcMarcHeyns2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4927Optimisation of dHF-based cleaning recipes: to remove or not to remove a particle?Proceedings paper