Elattari, BrahimBrahimElattariVan den Bosch, GeertGeertVan den BoschSchoenmaker, WimWimSchoenmakerGroeseneken, GuidoGuidoGroesenekenCoppens, P.P.CoppensMoens, P.P.MoensDe Pestel, F.F.De Pestel2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7552Impact of charging on breakdown in deep trench isolation structuresProceedings paper