Evaluation of cleaning recipes based on ozonated water for pre-gate oxide cleaning

Jeon, J. S.J. S.JeonOgle, B.B.OgleBaeyens, MartienMartienBaeyensMertens, PaulPaulMertens2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3538Evaluation of cleaning recipes based on ozonated water for pre-gate oxide cleaningProceedings paper