Murdoch, GayleGayleMurdochBoemmels, JuergenJuergenBoemmelsWilson, ChrisChrisWilsonBabaei Gavan, KhashayarKhashayarBabaei GavanLe, Quoc ToanQuoc ToanLeTokei, ZsoltZsoltTokeiClark, WilliamWilliamClark2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29039Feasibility study of fully self aligned vias for 5nm node BEOLProceedings paperhttp://ieeexplore.ieee.org/document/7968958/