Integration of high sheet resistance homogeneous emitters in a process flow for PERC-type solar cells with Cu contacts

Ngamo, MichelMichelNgamoTous, LoicLoicTousCornagliotti, EmanueleEmanueleCornagliottiHorzel, JörgJörgHorzelJanssens, TomTomJanssensRussell, RichardRichardRussellPoortmans, JefJefPoortmansLombardet, BenoitBenoitLombardet2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21197Integration of high sheet resistance homogeneous emitters in a process flow for PERC-type solar cells with Cu contactsProceedings paper