Process for making amorphous Indium-Gallium-Zinc-Oxide (a-IGZO) conductive at the source/drain areas of a-IGZO transistors

Muller, RobertRobertMullerNag, ManojManojNagUytterhoeven, GrietGrietUytterhoevenVandenplas, ErwinErwinVandenplasGenoe, JanJanGenoe2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22831Process for making amorphous Indium-Gallium-Zinc-Oxide (a-IGZO) conductive at the source/drain areas of a-IGZO transistorsOral presentationhttp://www.emrs-strasbourg.com/index.php?option=com_abstract&task=view&id=210&year=2013&Itemid=&id_season=9