Fluorine-free and fluroine containing MOCVD precursors for electronic oxides

Bedoya, C.C.BedoyaCondorelli, G.G.G.G.CondorelliDi Mauro, A.A.Di MauroAnastasi, G.G.AnastasiFragala, I.L.I.L.FragalaLisoni, JuditJuditLisoniWouters, DirkDirkWouters2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10075Fluorine-free and fluroine containing MOCVD precursors for electronic oxidesJournal article