Electrical Investigation of Wake-Up in High Endurance Fatigue-Free La and Y Doped HZO Meal-Ferroelectric-Metal Capacitors

Walke, AmeyAmeyWalkePopovici, Mihaela IoanaMihaela IoanaPopoviciBanerjee, KaustuvKaustuvBanerjeeClima, SergiuSergiuClimaKumbhare, PankajPankajKumbhareDesmet, JohanJohanDesmetMeersschaut, JohanJohanMeersschautVan den Bosch, GeertGeertVan den BoschDelhougne, RomainRomainDelhougneKar, Gouri SankarGouri SankarKarVan Houdt, JanJanVan Houdt2023-05-042022-07-252022-09-122023-05-042022-07-120018-9383WOS:000826073500001https://imec-publications.be/handle/20.500.12860/40172Electrical Investigation of Wake-Up in High Endurance Fatigue-Free La and Y Doped HZO Meal-Ferroelectric-Metal CapacitorsJournal article10.1109/TED.2022.3186869WOS:000826073500001Electrical & electronic engineering