Fathzadeh, AtefehAtefehFathzadehBezard, PhilippePhilippeBezardDarnon, MaximeMaximeDarnonManders, IngeIngeMandersConard, ThierryThierryConardHoflijk, IlseIlseHoflijkLazzarino, FredericFredericLazzarinoDe Gendt, StefanStefanDe Gendt2025-06-262024-04-132025-06-2620240734-2101WOS:001196138600002https://imec-publications.be/handle/20.500.12860/43821Transient-assisted plasma etching (TAPE): Concept, mechanism, and prospectsJournal article10.1116/6.0003380WOS:001196138600002AMORPHOUS-CARBONATOMIC OXYGENSPECTROSCOPYACTINOMETRYSPECTRARATIO