Growth and layer characterization of SrTiO3 by atomic layer deposition using Sr(tBu3Cp)2 and Ti(OMe)4

Popovici, Mihaela IoanaMihaela IoanaPopoviciVan Elshocht, SvenSvenVan ElshochtMenou, NicolasNicolasMenouSwerts, JohanJohanSwertsPierreux, DieterDieterPierreuxDelabie, AnneliesAnneliesDelabieOpsomer, KarlKarlOpsomerBrijs, BertBertBrijsFaelens, GerritGerritFaelensFranquet, AlexisAlexisFranquetConard, ThierryThierryConardMaes, Jan WillemJan WillemMaesWouters, DirkDirkWoutersKittl, Jorge AdrianJorge AdrianKittl2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16044Growth and layer characterization of SrTiO3 by atomic layer deposition using Sr(tBu3Cp)2 and Ti(OMe)4Proceedings paperhttp://www.mrs.org/s_mrs/bin.asp?CID=18435&DID=250629&DOC=FILE.PDF