High sensitivity photoconductivity based measurement setup for the determination of effective recombination lifetime in silicon wafers

Cornagliotti, EmanueleEmanueleCornagliottiKang, XuanwuXuanwuKangBeaucarne, GuyGuyBeaucarneJohn, JoachimJoachimJohnPoortmans, JefJefPoortmansMertens, RobertRobertMertens2021-10-172021-10-1720090034-6748https://imec-publications.be/handle/20.500.12860/15127High sensitivity photoconductivity based measurement setup for the determination of effective recombination lifetime in silicon wafersJournal articlewww.scitation.com