Sedky, SherifSherifSedkyBayoumy, AhmedAhmedBayoumyAlaa, AhmedAhmedAlaaNagy, AhmedAhmedNagyWitvrouw, AnnAnnWitvrouw2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12871Optimal conditions for micromachining Si1-xGex at 210CJournal article