An experimental study of VUV plasma damage on porous organo-silicon glass materials

de Marneffe, Jean-FrancoisJean-Francoisde MarneffeLukaszewicz, MikolajMikolajLukaszewiczHeyne, MarkusMarkusHeyneZhang, LipingLipingZhangBaklanov, MikhaïlMikhaïlBaklanov2021-10-212021-10-212013-02https://imec-publications.be/handle/20.500.12860/22210An experimental study of VUV plasma damage on porous organo-silicon glass materialsMeeting abstract