Struyf, HerbertHerbertStruyfDupont, TaniaTaniaDupontLe, Quoc ToanQuoc ToanLeBoullart, WernerWernerBoullartVanhaelemeersch, SergeSergeVanhaelemeersch2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9649Plasma-induced 193-nm resist deformation: problems and a possible solutionProceedings paper