Selective surface functionalization of Si and poly-SiGe resonators for a monolithic integration of bio- and gas sensors with CMOS

Armini, SilviaSilviaArminiCherman, VladimirVladimirChermanVolodin, AlexanderAlexanderVolodinLenci, SilviaSilviaLenciPieri, FrancescoFrancescoPieriWouters, DaanDaanWoutersMoonens, JosJosMoonensNeutens, PieterPieterNeutensDupre, CeciliaCeciliaDupreOllier, EricEricOllierTsuchiya, YoshiYoshiTsuchiyaMizuta, HiroshiHiroshiMizuta2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20306Selective surface functionalization of Si and poly-SiGe resonators for a monolithic integration of bio- and gas sensors with CMOSMeeting abstract