Characterisation of the local stress in CoSi2 silicided shallow trench isolation structures

Stuer, CindyCindyStuerSteegen, AnAnSteegenBender, HugoHugoBenderVan Landuyt, J.J.Van LanduytMaex, KarenKarenMaex2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5687Characterisation of the local stress in CoSi2 silicided shallow trench isolation structuresProceedings paper