Baklanov, MikhaïlMikhaïlBaklanovJehoul, ChristianeChristianeJehoulFlannery, C. M.C. M.FlanneryMoguilnikov, KonstantinKonstantinMoguilnikovGore, R.R.GoreGronbeck, D.D.GronbeckProkopowicz, G.G.ProkopowiczSullivan, C.C.SullivanYou, Y.Y.YouPugliano, N.N.PuglianoGallagher, M.M.Gallagher2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/5985Properties of mesoporous low-k MSSQ based film prepared using macromolecular porogenProceedings paper