Lesniewska, AlicjaAlicjaLesniewskaVarela Pedreira, OlallaOlallaVarela PedreiraLofrano, MelinaMelinaLofranoMurdoch, GayleGayleMurdochvan der Veen, MarleenMarleenvan der VeenDangol, AnishAnishDangolHoriguchi, NaotoNaotoHoriguchiTokei, ZsoltZsoltTokeiCroes, KristofKristofCroes2022-03-112022-03-1120211541-7026WOS:000672563100101https://imec-publications.be/handle/20.500.12860/39423Reliability of a DME Ru Semidamascene scheme with 16 nm wide AirgapsProceedings paper10.1109/IRPS46558.2021.9405192978-1-7281-6893-7WOS:000672563100101