Verdonck, PatrickPatrickVerdonckDelabie, AnneliesAnneliesDelabieSwerts, JohanJohanSwertsFarrell, LeoLeoFarrellBaklanov, MikhaïlMikhaïlBaklanovTielens, HildeHildeTielensVan Besien, ElsElsVan BesienWitters, ThomasThomasWittersNyns, LauraLauraNynsVan Elshocht, SvenSvenVan Elshocht2021-10-212021-10-2120130167-9317https://imec-publications.be/handle/20.500.12860/23324Chemisorption of ALD precursors in and on porous low-k filmsJournal article