Beernaert, RoelRoelBeernaertDe Coster, JeroenJeroenDe CosterPodprocky, TomasTomasPodprockyWitvrouw, AnnAnnWitvrouwSeveri, SimoneSimoneSeveriAvci, AykutAykutAvciDe Smet, JelleJelleDe SmetDe Smet, HerbertHerbertDe Smet2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/16722SiGe micromirrors for optical applicationsProceedings paperhttp://dx.doi.org/10.1117/12.873061