Barkad, H.A.H.A.BarkadSoltani, A.A.SoltaniMattalah, M.M.MattalahGerbedoen, J.C.J.C.GerbedoenRousseau, M.M.Rousseaude Jaeger, J.C.J.C.de JaegerBenmoussa, A.A.BenmoussaMortet, VincentVincentMortetHaenen, KenKenHaenenBenbakhti, B.B.BenbakhtiMoreau, M.M.MoreauDupuis, R.R.DupuisOugazzaden, A.A.Ougazzaden2021-10-182021-10-1820100022-3727https://imec-publications.be/handle/20.500.12860/16707Design, fabrication and physical analysis of TiN/AlN deep UV photodiodesJournal article