Wafer-level thin film vacuum packages for MEMS using nanoporous anodic alumina membranes

Zekry, JosephJosephZekrySabuncuoglu Tezcan, DenizDenizSabuncuoglu TezcanCelis, Jean-PierreJean-PierreCelisPuers, BobBobPuersVan Hoof, ChrisChrisVan HoofTilmans, HarrieHarrieTilmans2021-10-192021-10-192011-06https://imec-publications.be/handle/20.500.12860/20193Wafer-level thin film vacuum packages for MEMS using nanoporous anodic alumina membranesProceedings paper