Stress induced defect generation implications of doping HfO2 with Al

O'Connor, RobertRobertO'ConnorKauerauf, ThomasThomasKaueraufArimura, HiroakiHiroakiArimuraRagnarsson, Lars-AkeLars-AkeRagnarsson2021-10-212021-10-2120130167-9317https://imec-publications.be/handle/20.500.12860/22878Stress induced defect generation implications of doping HfO2 with AlJournal articlehttp://www.sciencedirect.com/science/article/pii/S0167931713003511