Hardy, AnAnHardyVan Bael, MarliesMarliesVan Bael2021-10-222021-10-222015-09https://imec-publications.be/handle/20.500.12860/25363Sol-gel deposition of ultrathin high-k dielectric filmsBook chapter10.1002/9783527670819.ch24http://onlinelibrary.wiley.com/doi/10.1002/9783527670819.ch24/summary