Implementation of a Si-rich SiON layer for an improved selective SiGe HBT architecture

Van Huylenbroeck, StefaanStefaanVan HuylenbroeckLoo, RogerRogerLooDecoutere, StefaanStefaanDecoutereVleugels, FrankFrankVleugelsKunnen, EddyEddyKunnenSchaekers, MarcMarcSchaekersCaymax, MattyMattyCaymax2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6944Implementation of a Si-rich SiON layer for an improved selective SiGe HBT architectureProceedings paper