Martin Hoyas, AnaAnaMartin HoyasBaeyens, MartienMartienBaeyensHub, W.W.HubMertens, PaulPaulMertensKolbesen, B. O.B. O.Kolbesen2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3655Alkaline cleaning of silicon wafers: additives for the prevention of metal contaminationJournal article