Whelan, CarolineCarolineWhelanCecchet, FrancescaFrancescaCecchetLe, Quoc ToanQuoc ToanLeSatta, AlessandraAlessandraSattaPireaux, Jean-JaquesJean-JaquesPireauxMaex, KarenKarenMaexRudolf, PetraPetraRudolf2021-10-152021-10-152002https://imec-publications.be/handle/20.500.12860/7052Sealing of porous low-k dielectric materials: UV-O3 oxidised CVD silicon oxycarbide materialsJournal article