Bhonsle, RithuRithuBhonsleTeugels, LieveLieveTeugelsUsman Ibrahim, AnsarAnsarUsman IbrahimOng, PatrickPatrickOngDelande, TinneTinneDelandeKrishnan, SitaramanSitaramanKrishnanSiebert, MaxMaxSiebertStruyf, HerbertHerbertStruyfLeunissen, LeonardusLeonardusLeunissen2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/24993Inspection, characterization and classification of defects for improved CMP of III-V materialsProceedings paper