The fate of the (reactive) primary ion: sputtering and desorption

Vandervorst, WilfriedWilfriedVandervorstJanssens, TomTomJanssensHuyghebaert, CedricCedricHuyghebaertBerghmans, BartBartBerghmans2021-10-172021-10-1720080169-4332https://imec-publications.be/handle/20.500.12860/14706The fate of the (reactive) primary ion: sputtering and desorptionJournal article