Defect study of polycrystalline-silicon seed layers made by aluminum induced crystallization

Venkatachalam, SrisaranSrisaranVenkatachalamVan Gestel, DriesDriesVan GestelGordon, IvanIvanGordon2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16458Defect study of polycrystalline-silicon seed layers made by aluminum induced crystallizationProceedings paper