Li, YunlongYunlongLiOba, YoshiyukiYoshiyukiObaWu, ChenChenWuVan Huylenbroeck, StefaanStefaanVan HuylenbroeckVan Besien, ElsElsVan BesienVereecke, GuyGuyVereeckeStucchi, MicheleMicheleStucchiDe Wolf, IngridIngridDe WolfBeyer, GeraldGeraldBeyerBeyne, EricEricBeyneCroes, KristofKristofCroes2021-10-222021-10-2220140003-6951https://imec-publications.be/handle/20.500.12860/24136Hydrogen outgassing induced liner barrier reliability degradation in through silicon via'sJournal articlehttp://dx.doi.org/10.1063/1.4871104