Damm, HanneHanneDammElen, KenKenElenDe Dobbelaere, ChristopherChristopherDe DobbelaereVan den broeck, F.F.Van den broeckMartins, J.J.MartinsD'Haen, JanJanD'HaenAdriaenssens, PeterPeterAdriaenssensHardy, AnAnHardyVan Bael, MarliesMarliesVan Bael2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22200From precursor towards incorported Al in ZnO TCO filmsOral presentation