Fleischmann, ClaudiaClaudiaFleischmannMelkonyan, DavitDavitMelkonyanArnoldi, LaurentLaurentArnoldiMorris, RichardRichardMorrisBogdanowicz, JanuszJanuszBogdanowiczVandervorst, WilfriedWilfriedVandervorst2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28337Atom probe tomography for advanced semiconductor technology researchMeeting abstracthttps://www.european-mrs.com/sites/default/files/pdf/conference_program.pdf