Alian, AliRezaAliRezaAlianBrammertz, GuyGuyBrammertzMerckling, ClementClementMercklingFirrincieli, AndreaAndreaFirrincieliWang, Wei-EWei-EWangLin, DennisDennisLinCaymax, MattyMattyCaymaxMeuris, MarcMarcMeurisDe Meyer, KristinKristinDe MeyerHeyns, MarcMarcHeyns2021-10-192021-10-1920110003-6951https://imec-publications.be/handle/20.500.12860/18464Ammonium sulfide vapor passivation of In0.53Ga0.47As and InP surfacesJournal articlehttp://apl.aip.org/resource/1/applab/v99/i11/p112114_s1