Tuzun, OzgeOzgeTuzunAuger, J. M.J. M.AugerGordon, IvanIvanGordonFocsa, AlexandruAlexandruFocsaMontgomery, P.C.P.C.MontgomeryMaurice, C.C.MauriceSlaoui, AbdouAbdouSlaouiBeaucarne, GuyGuyBeaucarnePoortmans, JefJefPoortmans2021-10-172021-10-1720080040-6090https://imec-publications.be/handle/20.500.12860/14584EBSD analysis of polysilicon films formed by aluminium induced crystallization of amorphous siliconJournal article