Electroless deposition on self-assembled monolayers as a method to enable fabrication of advanced interconnects

Maestre Caro, ArantxaArantxaMaestre CaroChebiam, Ramanan V.Ramanan V.ChebiamTeugels, LieveLieveTeugelsClendenning, ScottScottClendenningClarke, JimJimClarke2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22742Electroless deposition on self-assembled monolayers as a method to enable fabrication of advanced interconnectsMeeting abstracthttps://ecs.confex.com/ecs/224/webprogram/Paper23158.html